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Feasibility study for applying tribological theories in optimising SiC wafer polishing (2023–2024)

Grant type:
SICC Co., Ltd
Researchers:

  • Dr Yuan Xu

    Postdoctoral Research Fellow
    School of Chemical Engineering
    Faculty of Engineering, Architecture and Information Technology

  • Professor Jason Stokes

    Professor
    School of Chemical Engineering
    Faculty of Engineering, Architecture and Information Technology
Funded by:
SICC Co., Ltd